Scanning Electron Microscope (SEM)
morphology (SE mode) and atomic contrast (BSEmode) of the specimen surfaces
Secondary Ion Mass Spectrometry (SIMS)
Depth distribution of elements (C, Au, Ti, Si, …) withgreat sensitivity but problems due to charge effectsin the glass substrate
Glow Discharge Optical Emission Spectrometry (GDOES)with radio frequency
Depth distribution for all elements without chargeeffects